Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)∕Si(C) superlattice structures. II. High resolution reconstruction using neural network root finder technique

A neural network root finder approach for finding complex roots of high-degree complex polynomials was applied as part of the phase-retrieval x-ray diffractometry technique to reconstruct strain profiles in SiGe(C)∕Si(C) superlattice structures. The high spatial resolution, 5Å, as a result of signif...

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Veröffentlicht in:Journal of applied physics 2006-06, Vol.99 (11)
Hauptverfasser: Dilanian, Ruben A., Nikulin, Andrei Y., Darahanau, Aliaksandr V., Hester, James, Zaumseil, Peter
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container_issue 11
container_start_page
container_title Journal of applied physics
container_volume 99
creator Dilanian, Ruben A.
Nikulin, Andrei Y.
Darahanau, Aliaksandr V.
Hester, James
Zaumseil, Peter
description A neural network root finder approach for finding complex roots of high-degree complex polynomials was applied as part of the phase-retrieval x-ray diffractometry technique to reconstruct strain profiles in SiGe(C)∕Si(C) superlattice structures. The high spatial resolution, 5Å, as a result of significantly higher degree of the complex polynomial, 1400 roots, allowed us to obtain more accurate results for the strain profile distribution in SiGe(C)∕Si(C) superlattice structures. Previously, such high quality analysis was fundamentally impossible due to the limitations imposed by conventional numerical methods of finding complex polynomial roots.
doi_str_mv 10.1063/1.2201447
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subjects CARBON
DOPED MATERIALS
GERMANIUM ALLOYS
GERMANIUM SILICIDES
MATERIALS SCIENCE
NEURAL NETWORKS
POLYNOMIALS
SEMICONDUCTOR MATERIALS
SILICON
SILICON ALLOYS
SPATIAL RESOLUTION
SUPERLATTICES
X-RAY DIFFRACTION
title Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)∕Si(C) superlattice structures. II. High resolution reconstruction using neural network root finder technique
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