Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)∕Si(C) superlattice structures. II. High resolution reconstruction using neural network root finder technique
A neural network root finder approach for finding complex roots of high-degree complex polynomials was applied as part of the phase-retrieval x-ray diffractometry technique to reconstruct strain profiles in SiGe(C)∕Si(C) superlattice structures. The high spatial resolution, 5Å, as a result of signif...
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Veröffentlicht in: | Journal of applied physics 2006-06, Vol.99 (11) |
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creator | Dilanian, Ruben A. Nikulin, Andrei Y. Darahanau, Aliaksandr V. Hester, James Zaumseil, Peter |
description | A neural network root finder approach for finding complex roots of high-degree complex polynomials was applied as part of the phase-retrieval x-ray diffractometry technique to reconstruct strain profiles in SiGe(C)∕Si(C) superlattice structures. The high spatial resolution, 5Å, as a result of significantly higher degree of the complex polynomial, 1400 roots, allowed us to obtain more accurate results for the strain profile distribution in SiGe(C)∕Si(C) superlattice structures. Previously, such high quality analysis was fundamentally impossible due to the limitations imposed by conventional numerical methods of finding complex polynomial roots. |
doi_str_mv | 10.1063/1.2201447 |
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Previously, such high quality analysis was fundamentally impossible due to the limitations imposed by conventional numerical methods of finding complex polynomial roots.</description><subject>CARBON</subject><subject>DOPED MATERIALS</subject><subject>GERMANIUM ALLOYS</subject><subject>GERMANIUM SILICIDES</subject><subject>MATERIALS SCIENCE</subject><subject>NEURAL NETWORKS</subject><subject>POLYNOMIALS</subject><subject>SEMICONDUCTOR MATERIALS</subject><subject>SILICON</subject><subject>SILICON ALLOYS</subject><subject>SPATIAL RESOLUTION</subject><subject>SUPERLATTICES</subject><subject>X-RAY DIFFRACTION</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNotUUtOwzAUtBBIlM-CG1hiA4sUf-I4WaKKTyUkFsA6cp1naghxeHaA3oALcBmOw0lIKavR6M28GWkIOeJsylkhz_hUCMbzXG-RCWdllWml2DaZMCZ4Vla62iV7MT4xxnkpqwn5Pu_71luTfOhocLRfmggZQkIPb6alHxmaFW28c2hsCi_jYUVToNbgYnQ0oYeG3vkrOJmd_nx-3fkRaRx6wNak5C3QmHCwaUCIUzqfT-m1f1zSkYV2-AtFsKHbiNZ0iL57pB0MOKZ3kN4DPlMMIVHnuwaQJrDLzr8OcEB2nGkjHP7jPnm4vLifXWc3t1fz2flNZoXSKTMV50oqo60pyiJXuVNMVppJqYumVNIVwlmuF7llYNRi9DAlcuFcWQnQupT75HjzN8Tk62j9usHYuQObasF0pUopRtXpRmUxxIjg6h79i8FVzVm9nqbm9f808hcuzYRL</recordid><startdate>20060601</startdate><enddate>20060601</enddate><creator>Dilanian, Ruben A.</creator><creator>Nikulin, Andrei Y.</creator><creator>Darahanau, Aliaksandr V.</creator><creator>Hester, James</creator><creator>Zaumseil, Peter</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20060601</creationdate><title>Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)∕Si(C) superlattice structures. 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II. High resolution reconstruction using neural network root finder technique</atitle><jtitle>Journal of applied physics</jtitle><date>2006-06-01</date><risdate>2006</risdate><volume>99</volume><issue>11</issue><issn>0021-8979</issn><eissn>1089-7550</eissn><abstract>A neural network root finder approach for finding complex roots of high-degree complex polynomials was applied as part of the phase-retrieval x-ray diffractometry technique to reconstruct strain profiles in SiGe(C)∕Si(C) superlattice structures. The high spatial resolution, 5Å, as a result of significantly higher degree of the complex polynomial, 1400 roots, allowed us to obtain more accurate results for the strain profile distribution in SiGe(C)∕Si(C) superlattice structures. Previously, such high quality analysis was fundamentally impossible due to the limitations imposed by conventional numerical methods of finding complex polynomial roots.</abstract><cop>United States</cop><doi>10.1063/1.2201447</doi></addata></record> |
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subjects | CARBON DOPED MATERIALS GERMANIUM ALLOYS GERMANIUM SILICIDES MATERIALS SCIENCE NEURAL NETWORKS POLYNOMIALS SEMICONDUCTOR MATERIALS SILICON SILICON ALLOYS SPATIAL RESOLUTION SUPERLATTICES X-RAY DIFFRACTION |
title | Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)∕Si(C) superlattice structures. II. High resolution reconstruction using neural network root finder technique |
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