rf-generated ambient-afterglow plasma

Atmospheric pressure plasmas have gained importance due to their potential application in polymer surface treatment, surface cleaning of metals, thin film deposition, and destruction of biological hazards. In this paper a radio-frequency driven atmospheric pressure afterglow plasma source in argon a...

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Veröffentlicht in:Journal of applied physics 2006-04, Vol.99 (7), p.073303-073303-6
Hauptverfasser: Shakir, Shariff, Mynampati, Sandhya, Pashaie, Bijan, Dhali, Shirshak K.
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container_issue 7
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container_title Journal of applied physics
container_volume 99
creator Shakir, Shariff
Mynampati, Sandhya
Pashaie, Bijan
Dhali, Shirshak K.
description Atmospheric pressure plasmas have gained importance due to their potential application in polymer surface treatment, surface cleaning of metals, thin film deposition, and destruction of biological hazards. In this paper a radio-frequency driven atmospheric pressure afterglow plasma source in argon and helium is discussed. The light intensity measurement shows that the radio-frequency discharge is continuous in time unlike the intermittent nature of a low frequency dielectric-barrier discharge. The discharge, under ambient conditions, can be generated in argon, helium, and nitrogen. Spectroscopic measurements show that metastables are capable of producing oxygen atoms and other excited species. The argon afterglow, in particular, is capable of dissociating oxygen molecules in the ambient gas. An afterglow model has been developed to study the interaction of the plasma with the ambient gas. Results from applications of the plasma to surface treatment of metals and polymers, and bacterial decontamination are briefly discussed.
doi_str_mv 10.1063/1.2187275
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subjects 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
AFTERGLOW
ARGON
ATMOSPHERIC PRESSURE
DECONTAMINATION
DEPOSITION
DIELECTRIC MATERIALS
HELIUM
HIGH-FREQUENCY DISCHARGES
NITROGEN
OXYGEN
PLASMA
PLASMA DIAGNOSTICS
RADIOWAVE RADIATION
SURFACE CLEANING
SURFACE TREATMENTS
THIN FILMS
WALL EFFECTS
title rf-generated ambient-afterglow plasma
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