Transport line for beam generated by ITEP Bernas ion source

Transport line for beam generated by ITEP Bernas ion source

A joint research and development program is underway to investigate beam transport systems for intense steady-state ion sources for ion implanters. Two energy extremes of MeV and hundreds of eV are investigated using a modified Bernas ion source with an indirectly heated cathode. Results are present...

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Veröffentlicht in:Review of scientific instruments 2006-03, Vol.77 (3), p.03C112-03C112-3
Hauptverfasser: Petrenko, S. V., Kropachev, G. N., Kuibeda, R. P., Kulevoy, T. V., Pershin, V. I., Masunov, E. S., Polozov, S. M., Hershcovitch, A., Johnson, B. M., Poole, H. J.
Format: Artikel
Sprache:eng
Schlagworte:
BEAM TRANSPORT
BORON
CATHODES
ELECTROSTATIC LENSES
EV RANGE
ION BEAMS
ION IMPLANTATION
ION SOURCES
MEV RANGE
PARTICLE ACCELERATORS
SIMULATION
STEADY-STATE CONDITIONS
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Beschreibung
Zusammenfassung:A joint research and development program is underway to investigate beam transport systems for intense steady-state ion sources for ion implanters. Two energy extremes of MeV and hundreds of eV are investigated using a modified Bernas ion source with an indirectly heated cathode. Results are presented for simulations of electrostatic systems performed to investigate the transportation of ion beams over a wide mass range: boron to decaborane.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.2165746