Characterization of liquid cluster ion source by the time-of-flight method

A liquid cluster ion source, which offers many possibilities for new and advanced applications in the surface processing of materials, was developed, and the cluster size distribution was measured by using time-of-flight method. When the vapor pressure of liquid materials such as ethanol and water w...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Review of scientific instruments 2006-03, Vol.77 (3), p.03B509-03B509-3
Hauptverfasser: Takaoka, Gikan H., Noguchi, Hidetaka, Nakayama, Kazuya, Kawashita, Masakazu
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!