Self-organization of nanoneedles in Fe∕GaAs (001) epitaxial thin film

Well-aligned nanoneedles are found to form in a Fe∕GaAs (001) epitaxial thin film when irradiated with a Ga+ ion beam normal to the sample surface at an ion dose of 3×1017∕cm2 in a focused ion beam. These nanoneedles, with their axes perpendicular to the original sample surface, are composed of GaAs...

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Veröffentlicht in:Applied physics letters 2006-03, Vol.88 (10)
Hauptverfasser: Huang, Y. Z., Wang, S. G., Wang, C., Xie, Z. B., Cockayne, D. J. H., Ward, R. C. C.
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container_issue 10
container_start_page
container_title Applied physics letters
container_volume 88
creator Huang, Y. Z.
Wang, S. G.
Wang, C.
Xie, Z. B.
Cockayne, D. J. H.
Ward, R. C. C.
description Well-aligned nanoneedles are found to form in a Fe∕GaAs (001) epitaxial thin film when irradiated with a Ga+ ion beam normal to the sample surface at an ion dose of 3×1017∕cm2 in a focused ion beam. These nanoneedles, with their axes perpendicular to the original sample surface, are composed of GaAs nanorods with Fe nanoislands situated at the top. The GaAs nanorods, formed from the GaAs substrate, are crystalline and in the same crystal orientation as the GaAs substrate. The crystalline nature of the Fe thin film is disrupted by the ion sputtering, becoming nanocrystalline Fe islands. It is the thin Fe layer that is responsible for the formation of the nanoneedles. The ion sputtering of the Fe layer roughens the sample surface due to the uneven sputtering rate of the Fe layer. The removal of the Fe layer exposes the substrate to the incident ions, which then sputter the substrate leading to the formation of the nanoneedles.
doi_str_mv 10.1063/1.2182017
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subjects CRYSTALS
EPITAXY
ETCHING
GALLIUM ARSENIDES
GALLIUM IONS
GRAIN ORIENTATION
ION BEAMS
IRON
LAYERS
MAGNETIC ISLANDS
MATERIALS SCIENCE
NANOSTRUCTURES
SEMICONDUCTOR MATERIALS
SPUTTERING
SUBSTRATES
THIN FILMS
title Self-organization of nanoneedles in Fe∕GaAs (001) epitaxial thin film
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