Analysis and performance of a parallel axis flatness measuring instrument

This article describes the design, analysis, and performance of a flatness inspection instrument to measure workpieces with up to 1 mm departure from flatness. The instrument uses two air bearing spindles arranged with parallel axes to simultaneously rotate a workpiece and slowly pass a capacitance...

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Veröffentlicht in:	Review of scientific instruments 2006-02, Vol.77 (2), p.025105-025105-9
Hauptverfasser:	Marsh, Eric, Schalcosky, David, Couey, Jeremiah, Vallance, Ryan
Format:	Artikel
Sprache:	eng
Schlagworte:	AIR CAPACITANCE DESIGN DIAMONDS INSPECTION INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY MEASURING INSTRUMENTS PROBES SENSITIVITY SURFACES
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