p -type ZnO films with solid-source phosphorus doping by molecular-beam epitaxy

Phosphorus-doped p -type ZnO films were grown on r -plane sapphire substrates using molecular-beam epitaxy with a solid-source GaP effusion cell. X-ray diffraction spectra and reflection high-energy electron diffraction patterns indicate that high-quality single crystalline ( 11 2 ¯ 0 ) ZnO films we...

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