Electron Interaction Cross Sections for CF{sub 3}I, C{sub 2}F{sub 4}, and CF{sub x} (x=1-3) Radicals
The supply of absolute electron-impact cross sections for molecular targets and radicals is extremely important for developing plasma reactors and testing different types of etching gases. Current demand for such models is high as the industry aims to replace traditional plasma processing gases with...
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| Veröffentlicht in: | Journal of physical and chemical reference data 2006-03, Vol.35 (1) |
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| container_title | Journal of physical and chemical reference data |
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| creator | Rozum, I. Limao-Vieira, P. Eden, S. Tennyson, J. Mason, N. J. Centre of Molecular and Optical Sciences, The Open University, Milton Keynes MK7 6AA |
| description | The supply of absolute electron-impact cross sections for molecular targets and radicals is extremely important for developing plasma reactors and testing different types of etching gases. Current demand for such models is high as the industry aims to replace traditional plasma processing gases with less polluting species. New theoretical electron impact cross sections at typical etching plasma energies (sub 10 eV) are presented for the CF{sub x} (x=1-3) active radical species in a form suitable for plasma modeling. The available experimental and theoretical data are summarized for two potential feed gases, CF{sub 3}I and C{sub 2}F{sub 4}. This data cover recommended cross sections for electron scattering (total, excitation, momentum transfer, and elastic integral), electron impact dissociation, and dissociative electron attachment, wherever possible. Numerical values are given as tables in the paper and are also placed in the electronic archive. |
| doi_str_mv | 10.1063/1.2149379 |
| format | Article |
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This data cover recommended cross sections for electron scattering (total, excitation, momentum transfer, and elastic integral), electron impact dissociation, and dissociative electron attachment, wherever possible. 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This data cover recommended cross sections for electron scattering (total, excitation, momentum transfer, and elastic integral), electron impact dissociation, and dissociative electron attachment, wherever possible. 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J.</creator><creator>Centre of Molecular and Optical Sciences, The Open University, Milton Keynes MK7 6AA</creator><scope>OTOTI</scope></search><sort><creationdate>20060315</creationdate><title>Electron Interaction Cross Sections for CF{sub 3}I, C{sub 2}F{sub 4}, and CF{sub x} (x=1-3) Radicals</title><author>Rozum, I. ; Limao-Vieira, P. ; Eden, S. ; Tennyson, J. ; Mason, N. 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New theoretical electron impact cross sections at typical etching plasma energies (sub 10 eV) are presented for the CF{sub x} (x=1-3) active radical species in a form suitable for plasma modeling. The available experimental and theoretical data are summarized for two potential feed gases, CF{sub 3}I and C{sub 2}F{sub 4}. This data cover recommended cross sections for electron scattering (total, excitation, momentum transfer, and elastic integral), electron impact dissociation, and dissociative electron attachment, wherever possible. Numerical values are given as tables in the paper and are also placed in the electronic archive.</abstract><cop>United States</cop><doi>10.1063/1.2149379</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0047-2689 |
| ispartof | Journal of physical and chemical reference data, 2006-03, Vol.35 (1) |
| issn | 0047-2689 1529-7845 |
| language | eng |
| recordid | cdi_osti_scitechconnect_20768731 |
| source | AIP Journals Complete; Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals; Free Full-Text Journals in Chemistry |
| subjects | ATOMIC AND MOLECULAR PHYSICS CARBON FLUORIDES CROSS SECTIONS DISSOCIATION ELECTRON ATTACHMENT ELECTRON-MOLECULE COLLISIONS ELECTRONS ETCHING EXCITATION EXPERIMENTAL DATA GASES IONIZATION MOMENTUM TRANSFER ORGANIC COMPOUNDS PLASMA RADICALS THEORETICAL DATA |
| title | Electron Interaction Cross Sections for CF{sub 3}I, C{sub 2}F{sub 4}, and CF{sub x} (x=1-3) Radicals |
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