Development of a virtual probe tip with an application to high aspect ratio microscale features

Nondestructive measurement of microscale features remains a challenging metrology problem. For example, to assess a high aspect ratio small hole it is currently common to cut a cross section and measure the features of interest using an atomic force microscope, scanning probe microscope, or scanning...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Review of scientific instruments 2005-09, Vol.76 (9)
Hauptverfasser:	Bauza, Marcin B., Hocken, Robert J., Smith, Stuart T., Woody, Shane C.
Format:	Artikel
Sprache:	eng
Schlagworte:	AMPLITUDES ASPECT RATIO ATOMIC FORCE MICROSCOPY CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS KHZ RANGE MICROSCOPES OSCILLATIONS OSCILLATORS PROBES RUBY SCANNING ELECTRON MICROSCOPY SPHERES STANDING WAVES SURFACES
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!