High-frequency surface acoustic wave devices based on LiNbO{sub 3}/diamond multilayered structure
This research is focused on the development of a new technology for the fabrication of high-frequency surface acoustic wave (SAW) filters based on diamond and lithium niobate (LiNbO{sub 3}) materials. LiNbO{sub 3} films are in situ deposited at 490 deg. C on polycrystalline diamond substrates by rad...
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| Veröffentlicht in: | Applied physics letters 2005-11, Vol.87 (21) |
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| container_title | Applied physics letters |
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| creator | Dogheche, E. Remiens, D. Shikata, S. Hachigo, A. Nakahata, H. Device Technology Center, Sumitomo Electric Industries, 1-1-3 Shimaya. Konohana-ku, Osaka 554-0024 |
| description | This research is focused on the development of a new technology for the fabrication of high-frequency surface acoustic wave (SAW) filters based on diamond and lithium niobate (LiNbO{sub 3}) materials. LiNbO{sub 3} films are in situ deposited at 490 deg. C on polycrystalline diamond substrates by radio-frequency magnetron sputtering; a multistep growth process is proposed to deposit oriented LiNbO{sub 3} films with a smooth surface. Conventional interdigital transducers are fabricated on top of the piezoelectric LiNbO{sub 3} layer by standard optical lithography. We report experimental results for a SAW bandpass filter operating at a frequency above 2.30 GHz. We have observed that Rayleigh SAW modes are excited within this structure, with extremely high phase velocities (up to 12 000 m/s). This latter result illustrates the greatest advantage of using diamond as an acoustic substrate. It allows the fabrication of SAW devices operating in the gigahertz frequency range using standard optical lithography. |
| doi_str_mv | 10.1063/1.2135383 |
| format | Article |
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Konohana-ku, Osaka 554-0024</creator><creatorcontrib>Dogheche, E. ; Remiens, D. ; Shikata, S. ; Hachigo, A. ; Nakahata, H. ; Device Technology Center, Sumitomo Electric Industries, 1-1-3 Shimaya. Konohana-ku, Osaka 554-0024</creatorcontrib><description>This research is focused on the development of a new technology for the fabrication of high-frequency surface acoustic wave (SAW) filters based on diamond and lithium niobate (LiNbO{sub 3}) materials. LiNbO{sub 3} films are in situ deposited at 490 deg. C on polycrystalline diamond substrates by radio-frequency magnetron sputtering; a multistep growth process is proposed to deposit oriented LiNbO{sub 3} films with a smooth surface. Conventional interdigital transducers are fabricated on top of the piezoelectric LiNbO{sub 3} layer by standard optical lithography. We report experimental results for a SAW bandpass filter operating at a frequency above 2.30 GHz. We have observed that Rayleigh SAW modes are excited within this structure, with extremely high phase velocities (up to 12 000 m/s). This latter result illustrates the greatest advantage of using diamond as an acoustic substrate. It allows the fabrication of SAW devices operating in the gigahertz frequency range using standard optical lithography.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.2135383</identifier><language>eng</language><publisher>United States</publisher><subject>CRYSTAL GROWTH ; DEPOSITION ; DIAMONDS ; GHZ RANGE 01-100 ; LAYERS ; LITHIUM COMPOUNDS ; MATERIALS SCIENCE ; NIOBATES ; PHASE VELOCITY ; PIEZOELECTRICITY ; POLYCRYSTALS ; RADIOWAVE RADIATION ; SOUND WAVES ; SPUTTERING ; SUBSTRATES ; SURFACES ; TEMPERATURE RANGE 0400-1000 K ; THIN FILMS ; TRANSDUCERS</subject><ispartof>Applied physics letters, 2005-11, Vol.87 (21)</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,776,780,881,27901,27902</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/20706439$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Dogheche, E.</creatorcontrib><creatorcontrib>Remiens, D.</creatorcontrib><creatorcontrib>Shikata, S.</creatorcontrib><creatorcontrib>Hachigo, A.</creatorcontrib><creatorcontrib>Nakahata, H.</creatorcontrib><creatorcontrib>Device Technology Center, Sumitomo Electric Industries, 1-1-3 Shimaya. Konohana-ku, Osaka 554-0024</creatorcontrib><title>High-frequency surface acoustic wave devices based on LiNbO{sub 3}/diamond multilayered structure</title><title>Applied physics letters</title><description>This research is focused on the development of a new technology for the fabrication of high-frequency surface acoustic wave (SAW) filters based on diamond and lithium niobate (LiNbO{sub 3}) materials. LiNbO{sub 3} films are in situ deposited at 490 deg. C on polycrystalline diamond substrates by radio-frequency magnetron sputtering; a multistep growth process is proposed to deposit oriented LiNbO{sub 3} films with a smooth surface. Conventional interdigital transducers are fabricated on top of the piezoelectric LiNbO{sub 3} layer by standard optical lithography. We report experimental results for a SAW bandpass filter operating at a frequency above 2.30 GHz. We have observed that Rayleigh SAW modes are excited within this structure, with extremely high phase velocities (up to 12 000 m/s). This latter result illustrates the greatest advantage of using diamond as an acoustic substrate. It allows the fabrication of SAW devices operating in the gigahertz frequency range using standard optical lithography.</description><subject>CRYSTAL GROWTH</subject><subject>DEPOSITION</subject><subject>DIAMONDS</subject><subject>GHZ RANGE 01-100</subject><subject>LAYERS</subject><subject>LITHIUM COMPOUNDS</subject><subject>MATERIALS SCIENCE</subject><subject>NIOBATES</subject><subject>PHASE VELOCITY</subject><subject>PIEZOELECTRICITY</subject><subject>POLYCRYSTALS</subject><subject>RADIOWAVE RADIATION</subject><subject>SOUND WAVES</subject><subject>SPUTTERING</subject><subject>SUBSTRATES</subject><subject>SURFACES</subject><subject>TEMPERATURE RANGE 0400-1000 K</subject><subject>THIN FILMS</subject><subject>TRANSDUCERS</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNqNjE1Lw0AQQBdRMH4c-g8GPKfdzZikPYvSg7SX3stmMrFb0l3c2a0U8b-bgz_A0-PB4yk1M3pudIMLM68M1rjEK1UY3bYlGrO8VoXWGstmVZtbdSdynLSuEAtl1-7jUA6RPzN7uoDkOFhisBSyJEfwZc8MPZ8dsUBnhXsIHt7dptt-S-4Afxa9s6fgezjlMbnRXjhOkaSYKeXID-pmsKPw4x_v1dPb6-5lXYbpvxdyielAwXumtK90q5tnXOH_ql-6uErX</recordid><startdate>20051121</startdate><enddate>20051121</enddate><creator>Dogheche, E.</creator><creator>Remiens, D.</creator><creator>Shikata, S.</creator><creator>Hachigo, A.</creator><creator>Nakahata, H.</creator><creator>Device Technology Center, Sumitomo Electric Industries, 1-1-3 Shimaya. Konohana-ku, Osaka 554-0024</creator><scope>OTOTI</scope></search><sort><creationdate>20051121</creationdate><title>High-frequency surface acoustic wave devices based on LiNbO{sub 3}/diamond multilayered structure</title><author>Dogheche, E. ; Remiens, D. ; Shikata, S. ; Hachigo, A. ; Nakahata, H. ; Device Technology Center, Sumitomo Electric Industries, 1-1-3 Shimaya. 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Konohana-ku, Osaka 554-0024</creatorcontrib><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dogheche, E.</au><au>Remiens, D.</au><au>Shikata, S.</au><au>Hachigo, A.</au><au>Nakahata, H.</au><au>Device Technology Center, Sumitomo Electric Industries, 1-1-3 Shimaya. Konohana-ku, Osaka 554-0024</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High-frequency surface acoustic wave devices based on LiNbO{sub 3}/diamond multilayered structure</atitle><jtitle>Applied physics letters</jtitle><date>2005-11-21</date><risdate>2005</risdate><volume>87</volume><issue>21</issue><issn>0003-6951</issn><eissn>1077-3118</eissn><abstract>This research is focused on the development of a new technology for the fabrication of high-frequency surface acoustic wave (SAW) filters based on diamond and lithium niobate (LiNbO{sub 3}) materials. LiNbO{sub 3} films are in situ deposited at 490 deg. C on polycrystalline diamond substrates by radio-frequency magnetron sputtering; a multistep growth process is proposed to deposit oriented LiNbO{sub 3} films with a smooth surface. Conventional interdigital transducers are fabricated on top of the piezoelectric LiNbO{sub 3} layer by standard optical lithography. We report experimental results for a SAW bandpass filter operating at a frequency above 2.30 GHz. We have observed that Rayleigh SAW modes are excited within this structure, with extremely high phase velocities (up to 12 000 m/s). This latter result illustrates the greatest advantage of using diamond as an acoustic substrate. It allows the fabrication of SAW devices operating in the gigahertz frequency range using standard optical lithography.</abstract><cop>United States</cop><doi>10.1063/1.2135383</doi></addata></record> |
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| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2005-11, Vol.87 (21) |
| issn | 0003-6951 1077-3118 |
| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive |
| subjects | CRYSTAL GROWTH DEPOSITION DIAMONDS GHZ RANGE 01-100 LAYERS LITHIUM COMPOUNDS MATERIALS SCIENCE NIOBATES PHASE VELOCITY PIEZOELECTRICITY POLYCRYSTALS RADIOWAVE RADIATION SOUND WAVES SPUTTERING SUBSTRATES SURFACES TEMPERATURE RANGE 0400-1000 K THIN FILMS TRANSDUCERS |
| title | High-frequency surface acoustic wave devices based on LiNbO{sub 3}/diamond multilayered structure |
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