Monte Carlo sensitivity analysis of CF{sub 2} and CF radical densities in a c-C{sub 4}F{sub 8} plasma

A Monte Carlo sensitivity analysis is used to build a plasma chemistry model for octacyclofluorobutane (c-C{sub 4}F{sub 8}) which is commonly used in dielectric etch. Experimental data are used both quantitatively and qualitatively to analyze the gas phase and gas surface reactions for neutral radical chemistry. The sensitivity data of the resulting model identifies a few critical gas phase and surface aided reactions that account for most of the uncertainty in the CF{sub 2} and CF radical densities. Electron impact dissociation of small radicals (CF{sub 2} and CF) and their surface recombination reactions are found to be the rate-limiting steps in the neutral radical chemistry. The relative rates for these electron impact dissociation and surface recombination reactions are also suggested. The resulting mechanism is able to explain the measurements of CF{sub 2} and CF densities available in the literature and also their hollow spatial density profiles.