Microhollow cathode discharge excimer lamps
Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 μm range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Ex...
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| Veröffentlicht in: | Physics of Plasmas 2000-05, Vol.7 (5), p.2186-2191 |
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| container_issue | 5 |
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| container_title | Physics of Plasmas |
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| creator | Schoenbach, Karl H. El-Habachi, Ahmed Moselhy, Mohamed M. Shi, Wenhui Stark, Robert H. |
| description | Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 μm range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Excimer emission was observed in xenon and argon, at wavelengths of 128 and 172 nm, respectively, and in argon fluoride and xenon chloride, at 193 and 308 nm. The radiant emittance of the excimer radiation was found to increase monotonically with pressure. However, due to the decrease in source size with pressure, the efficiency (ratio of excimer radiant power to input electrical power), has for xenon and argon fluoride a maximum at ∼400 Torr. The maximum efficiency is between 6% and 9% for xenon, and ∼2% for argon fluoride. |
| doi_str_mv | 10.1063/1.874039 |
| format | Article |
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| ispartof | Physics of Plasmas, 2000-05, Vol.7 (5), p.2186-2191 |
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| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive |
| subjects | 70 PLASMA PHYSICS AND FUSION TECHNOLOGY ARGON ELECTRIC DISCHARGES EXCIMER LASERS EXPERIMENTAL DATA GAS DISCHARGE TUBES HOLLOW CATHODES ULTRAVIOLET SPECTRA XENON |
| title | Microhollow cathode discharge excimer lamps |
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