Near surface structure of ultrathin epitaxial Ru films on graphene/amorphous SiO2 revealed by azimuthal RHEED
Ru has been considered as an alternative metallic candidate for future local interconnects. The 2D reciprocal space map constructed from the azimuthal reflection high-energy electron diffraction patterns reveals that ultrathin Ru(0001) is epitaxially grown on transferred graphene on amorphous SiO 2...
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| Veröffentlicht in: | Journal of materials research 2023-03, Vol.38 (5), p.1224-1238 |
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| creator | Lu, Zonghuan Dhull, Neha Chen, Xuegang Zhang, Lihua Kisslinger, Kim Kuan, Tung-Sheng Washington, Morris A. Lu, Toh-Ming Wang, Gwo-Ching |
| description | Ru has been considered as an alternative metallic candidate for future local interconnects. The 2D reciprocal space map constructed from the azimuthal reflection high-energy electron diffraction patterns reveals that ultrathin Ru(0001) is epitaxially grown on transferred graphene on amorphous SiO
2
through quasi-van der Waals interaction. The in-plane and out-of-plane lattice constants are measured from streaks’ separation and intensity modulations along streaks, respectively. Weak and broad rings indicate that a low density of nanoscale polycrystals exist on the surface. The intensities of 00 and non-00 diffraction spots vs. azimuthal angles in the 2D map show a few degrees out-of-plane and in-plane angular misorientations among grains, respectively. As the film thickness decreases these angular misorientations increase. Transmission electron microscopy carried out in this study also provides precise values of lattice constant and sub-grain sizes in the films. These findings show that ultrathin Ru film is epitaxial but not exactly single crystalline.
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| doi_str_mv | 10.1557/s43578-022-00878-7 |
| format | Article |
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2
through quasi-van der Waals interaction. The in-plane and out-of-plane lattice constants are measured from streaks’ separation and intensity modulations along streaks, respectively. Weak and broad rings indicate that a low density of nanoscale polycrystals exist on the surface. The intensities of 00 and non-00 diffraction spots vs. azimuthal angles in the 2D map show a few degrees out-of-plane and in-plane angular misorientations among grains, respectively. As the film thickness decreases these angular misorientations increase. Transmission electron microscopy carried out in this study also provides precise values of lattice constant and sub-grain sizes in the films. These findings show that ultrathin Ru film is epitaxial but not exactly single crystalline.
Graphical abstract</description><identifier>ISSN: 0884-2914</identifier><identifier>EISSN: 2044-5326</identifier><identifier>DOI: 10.1557/s43578-022-00878-7</identifier><language>eng</language><publisher>Cham: Springer International Publishing</publisher><subject>Applied and Technical Physics ; Azimuthal RHEED ; Biomaterials ; Chemistry and Materials Science ; Diffraction patterns ; Electron diffraction ; Epitaxial growth ; Film thickness ; Grain size ; Graphene ; High energy electrons ; Inorganic Chemistry ; Lattice parameters ; Materials Engineering ; Materials research ; MATERIALS SCIENCE ; Nanotechnology ; Polycrystals ; Quasi-van der Waals epitaxy ; Silicon dioxide ; Single crystalline graphene ; Surface structure ; TEM ; Ultrathin ruthenium film ; XPS</subject><ispartof>Journal of materials research, 2023-03, Vol.38 (5), p.1224-1238</ispartof><rights>The Author(s), under exclusive licence to The Materials Research Society 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c346t-bce6d75503cacdef3fa84a84cf8b7aff0a9f8a38d44d8119495ddca59e16336d3</citedby><cites>FETCH-LOGICAL-c346t-bce6d75503cacdef3fa84a84cf8b7aff0a9f8a38d44d8119495ddca59e16336d3</cites><orcidid>0000-0003-1875-3345 ; 0000000318753345 ; 0000000333312345</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1557/s43578-022-00878-7$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1557/s43578-022-00878-7$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>230,314,780,784,885,27923,27924,41487,42556,51318</link.rule.ids><backlink>$$Uhttps://www.osti.gov/servlets/purl/1958997$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Lu, Zonghuan</creatorcontrib><creatorcontrib>Dhull, Neha</creatorcontrib><creatorcontrib>Chen, Xuegang</creatorcontrib><creatorcontrib>Zhang, Lihua</creatorcontrib><creatorcontrib>Kisslinger, Kim</creatorcontrib><creatorcontrib>Kuan, Tung-Sheng</creatorcontrib><creatorcontrib>Washington, Morris A.</creatorcontrib><creatorcontrib>Lu, Toh-Ming</creatorcontrib><creatorcontrib>Wang, Gwo-Ching</creatorcontrib><creatorcontrib>Brookhaven National Laboratory (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)</creatorcontrib><title>Near surface structure of ultrathin epitaxial Ru films on graphene/amorphous SiO2 revealed by azimuthal RHEED</title><title>Journal of materials research</title><addtitle>Journal of Materials Research</addtitle><description>Ru has been considered as an alternative metallic candidate for future local interconnects. The 2D reciprocal space map constructed from the azimuthal reflection high-energy electron diffraction patterns reveals that ultrathin Ru(0001) is epitaxially grown on transferred graphene on amorphous SiO
2
through quasi-van der Waals interaction. The in-plane and out-of-plane lattice constants are measured from streaks’ separation and intensity modulations along streaks, respectively. Weak and broad rings indicate that a low density of nanoscale polycrystals exist on the surface. The intensities of 00 and non-00 diffraction spots vs. azimuthal angles in the 2D map show a few degrees out-of-plane and in-plane angular misorientations among grains, respectively. As the film thickness decreases these angular misorientations increase. Transmission electron microscopy carried out in this study also provides precise values of lattice constant and sub-grain sizes in the films. These findings show that ultrathin Ru film is epitaxial but not exactly single crystalline.
Graphical abstract</description><subject>Applied and Technical Physics</subject><subject>Azimuthal RHEED</subject><subject>Biomaterials</subject><subject>Chemistry and Materials Science</subject><subject>Diffraction patterns</subject><subject>Electron diffraction</subject><subject>Epitaxial growth</subject><subject>Film thickness</subject><subject>Grain size</subject><subject>Graphene</subject><subject>High energy electrons</subject><subject>Inorganic Chemistry</subject><subject>Lattice parameters</subject><subject>Materials Engineering</subject><subject>Materials research</subject><subject>MATERIALS SCIENCE</subject><subject>Nanotechnology</subject><subject>Polycrystals</subject><subject>Quasi-van der Waals epitaxy</subject><subject>Silicon dioxide</subject><subject>Single crystalline graphene</subject><subject>Surface structure</subject><subject>TEM</subject><subject>Ultrathin ruthenium film</subject><subject>XPS</subject><issn>0884-2914</issn><issn>2044-5326</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2023</creationdate><recordtype>article</recordtype><recordid>eNp9kEtr3TAQRkVpobdp_0BXIlm70dOWliG9bQKhgT7WQlcexQq25egRmv76-saB7goDM4vzfQwHoY-UfKJSdudZcNmphjDWEKLWq3uFdowI0UjO2tdoR5QSDdNUvEXvcr4nhErSiR2avoFNONfkrQOcS6qu1AQ4elzHkmwZwoxhCcX-DnbE3yv2YZwyjjO-S3YZYIZzO8W0DLFm_CPcMpzgEewIPT48YfsnTLUMx-TVfv_5PXrj7Zjhw8s-Qb--7H9eXjU3t1-vLy9uGsdFW5qDg7bvpCTcWdeD594qsY7z6tBZ74nVXlmueiF6RakWWva9s1IDbTlve36CTrfemEsw2YUCbnBxnsEVQ7VUWncrdLZBS4oPFXIx97Gmef3LsE4zKVSr6UqxjXIp5pzAmyWFyaYnQ4k5ujebe7O6N8_uzbGab6G8wvMdpH_V_0n9BRVKiJM</recordid><startdate>20230314</startdate><enddate>20230314</enddate><creator>Lu, Zonghuan</creator><creator>Dhull, Neha</creator><creator>Chen, Xuegang</creator><creator>Zhang, Lihua</creator><creator>Kisslinger, Kim</creator><creator>Kuan, Tung-Sheng</creator><creator>Washington, Morris A.</creator><creator>Lu, Toh-Ming</creator><creator>Wang, Gwo-Ching</creator><general>Springer International Publishing</general><general>Springer Nature B.V</general><general>Springer Nature</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>OIOZB</scope><scope>OTOTI</scope><orcidid>https://orcid.org/0000-0003-1875-3345</orcidid><orcidid>https://orcid.org/0000000318753345</orcidid><orcidid>https://orcid.org/0000000333312345</orcidid></search><sort><creationdate>20230314</creationdate><title>Near surface structure of ultrathin epitaxial Ru films on graphene/amorphous SiO2 revealed by azimuthal RHEED</title><author>Lu, Zonghuan ; Dhull, Neha ; Chen, Xuegang ; Zhang, Lihua ; Kisslinger, Kim ; Kuan, Tung-Sheng ; Washington, Morris A. ; Lu, Toh-Ming ; Wang, Gwo-Ching</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c346t-bce6d75503cacdef3fa84a84cf8b7aff0a9f8a38d44d8119495ddca59e16336d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2023</creationdate><topic>Applied and Technical Physics</topic><topic>Azimuthal RHEED</topic><topic>Biomaterials</topic><topic>Chemistry and Materials Science</topic><topic>Diffraction patterns</topic><topic>Electron diffraction</topic><topic>Epitaxial growth</topic><topic>Film thickness</topic><topic>Grain size</topic><topic>Graphene</topic><topic>High energy electrons</topic><topic>Inorganic Chemistry</topic><topic>Lattice parameters</topic><topic>Materials Engineering</topic><topic>Materials research</topic><topic>MATERIALS SCIENCE</topic><topic>Nanotechnology</topic><topic>Polycrystals</topic><topic>Quasi-van der Waals epitaxy</topic><topic>Silicon dioxide</topic><topic>Single crystalline graphene</topic><topic>Surface structure</topic><topic>TEM</topic><topic>Ultrathin ruthenium film</topic><topic>XPS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lu, Zonghuan</creatorcontrib><creatorcontrib>Dhull, Neha</creatorcontrib><creatorcontrib>Chen, Xuegang</creatorcontrib><creatorcontrib>Zhang, Lihua</creatorcontrib><creatorcontrib>Kisslinger, Kim</creatorcontrib><creatorcontrib>Kuan, Tung-Sheng</creatorcontrib><creatorcontrib>Washington, Morris A.</creatorcontrib><creatorcontrib>Lu, Toh-Ming</creatorcontrib><creatorcontrib>Wang, Gwo-Ching</creatorcontrib><creatorcontrib>Brookhaven National Laboratory (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>OSTI.GOV - Hybrid</collection><collection>OSTI.GOV</collection><jtitle>Journal of materials research</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lu, Zonghuan</au><au>Dhull, Neha</au><au>Chen, Xuegang</au><au>Zhang, Lihua</au><au>Kisslinger, Kim</au><au>Kuan, Tung-Sheng</au><au>Washington, Morris A.</au><au>Lu, Toh-Ming</au><au>Wang, Gwo-Ching</au><aucorp>Brookhaven National Laboratory (BNL), Upton, NY (United States). Center for Functional Nanomaterials (CFN)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Near surface structure of ultrathin epitaxial Ru films on graphene/amorphous SiO2 revealed by azimuthal RHEED</atitle><jtitle>Journal of materials research</jtitle><stitle>Journal of Materials Research</stitle><date>2023-03-14</date><risdate>2023</risdate><volume>38</volume><issue>5</issue><spage>1224</spage><epage>1238</epage><pages>1224-1238</pages><issn>0884-2914</issn><eissn>2044-5326</eissn><abstract>Ru has been considered as an alternative metallic candidate for future local interconnects. The 2D reciprocal space map constructed from the azimuthal reflection high-energy electron diffraction patterns reveals that ultrathin Ru(0001) is epitaxially grown on transferred graphene on amorphous SiO
2
through quasi-van der Waals interaction. The in-plane and out-of-plane lattice constants are measured from streaks’ separation and intensity modulations along streaks, respectively. Weak and broad rings indicate that a low density of nanoscale polycrystals exist on the surface. The intensities of 00 and non-00 diffraction spots vs. azimuthal angles in the 2D map show a few degrees out-of-plane and in-plane angular misorientations among grains, respectively. As the film thickness decreases these angular misorientations increase. Transmission electron microscopy carried out in this study also provides precise values of lattice constant and sub-grain sizes in the films. These findings show that ultrathin Ru film is epitaxial but not exactly single crystalline.
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| subjects | Applied and Technical Physics Azimuthal RHEED Biomaterials Chemistry and Materials Science Diffraction patterns Electron diffraction Epitaxial growth Film thickness Grain size Graphene High energy electrons Inorganic Chemistry Lattice parameters Materials Engineering Materials research MATERIALS SCIENCE Nanotechnology Polycrystals Quasi-van der Waals epitaxy Silicon dioxide Single crystalline graphene Surface structure TEM Ultrathin ruthenium film XPS |
| title | Near surface structure of ultrathin epitaxial Ru films on graphene/amorphous SiO2 revealed by azimuthal RHEED |
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