2D materials-assisted heterogeneous integration of semiconductor membranes toward functional devices

Heterogeneous integration techniques allow the coupling of highly lattice-mismatched solid-state membranes, including semiconductors, oxides, and two-dimensional materials, to synergistically fuse the functionalities. The formation of heterostructures generally requires two processes: the combinatio...

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Veröffentlicht in:Journal of applied physics 2022-11, Vol.132 (19)
Hauptverfasser: Park, Minseong, Bae, Byungjoon, Kim, Taegeon, Kum, Hyun S., Lee, Kyusang
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Sprache:eng
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