Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115° at a fixed wavelength...

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Veröffentlicht in:	Optics letters 2023-02, Vol.48 (3), p.807-810
Hauptverfasser:	Nejadriahi, Hani, Gaur, Prabhav, Johnson, Karl, Pappert, Steve, Fainman, Yeshaiahu, Yu, Paul
Format:	Artikel
Sprache:	eng
Schlagworte:	Beam steering Boresights Phased arrays Photon absorption Silicon nitride
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creator	Nejadriahi, Hani Gaur, Prabhav Johnson, Karl Pappert, Steve Fainman, Yeshaiahu Yu, Paul
description	The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115° at a fixed wavelength of 1525 nm. A beam width of 6.3° has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity [negligible two-photon absorption (TPA)], wide transparency window, and CMOS compatibility.
doi_str_mv	10.1364/OL.476819
format	Article
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subjects	Beam steering Boresights Phased arrays Photon absorption Silicon nitride
title	Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride
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