Resonant x-ray scattering method for measuring cation stoichiometry in BaSnO3 thin films

We develop a resonant scattering technique to measure cation stoichiometry of lanthanum-doped BaSnO3 (BSO) thin films on a DyScO3 substrate. Samples are grown by a hybrid molecular beam epitaxy method and display high room-temperature carrier mobilities. The measured thin films are grown with widely...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2021-12, Vol.40 (1)
Hauptverfasser:	Lau, Claudia, Combs, Nicholas G., Karapetrova, Evguenia, Jiang, Juan, Stemmer, Susanne, Ahn, Charles H., Walker, Frederick J.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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