High-energy ballistic electrons in low-pressure radio-frequency plasmas

This work demonstrates the presence of a small number of high-energy ballistic electrons (HEBEs) that originate from secondary electrons in low-pressure radio-frequency (rf) plasmas. The kinetic behaviors of the HEBEs are illustrated through electron energy probability functions from the fully kinet...

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Veröffentlicht in:	Plasma sources science & technology 2020-10, Vol.29 (9), p.9
Hauptverfasser:	Fu, Yangyang, Zheng, Bocong, Wen, De-Qi, Zhang, Peng, Fan, Qi Hua, Verboncoeur, John P
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY ballistic electron electron energy probability function energetic electron nonlocal electron kinetics particle-in-cell simulation RF plasma secondary electron
Online-Zugang:	Volltext
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