Anisotropic index of refraction and structural properties of hexagonal boron nitride epilayers probed by spectroscopic ellipsometry

The anisotropic index of refraction of 200 μm thick boron-10 enriched hexagonal boron nitride (h-BN) freestanding epilayers grown by metalorganic chemical vapor deposition has been measured using spectroscopic ellipsometry in the UV (4.0–5.1 eV) spectral range. It was found that the index of refract...

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Veröffentlicht in:Journal of applied physics 2020-02, Vol.127 (5)
Hauptverfasser: McKay, M. A., Li, J., Lin, J. Y., Jiang, H. X.
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description The anisotropic index of refraction of 200 μm thick boron-10 enriched hexagonal boron nitride (h-BN) freestanding epilayers grown by metalorganic chemical vapor deposition has been measured using spectroscopic ellipsometry in the UV (4.0–5.1 eV) spectral range. It was found that the index of refraction for the polarization mode with an electric field perpendicular to the c-axis (ordinary, no) is much higher than that with an electric field parallel to the c-axis (extraordinary, ne). By inclusion of turbostratic- (t-) phase layers within h-BN having an average inclination angle (θ) with respect to the ideal c-plane, a simple method for quantifying θ has been deduced. Our results revealed that the presence of t-phase layers decreases the optical anisotropy of h-BN and that a signature of improved crystalline quality is an increase in the ordinary index of refraction (no) as a result of the average incline angle θ approaching 0° and predicted that no = 2.7 and ne = 1.5 at 280 nm for single crystalline h-BN epilayers. More importantly, our results demonstrated that spectroscopic ellipsometry is an effective technique for characterizing the crystalline quality of h-BN epilayers with the advantages of being noninvasive and highly sensitive.
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X.</creator><creatorcontrib>McKay, M. A. ; Li, J. ; Lin, J. Y. ; Jiang, H. X. ; Texas Tech Univ., Lubbock, TX (United States)</creatorcontrib><description>The anisotropic index of refraction of 200 μm thick boron-10 enriched hexagonal boron nitride (h-BN) freestanding epilayers grown by metalorganic chemical vapor deposition has been measured using spectroscopic ellipsometry in the UV (4.0–5.1 eV) spectral range. It was found that the index of refraction for the polarization mode with an electric field perpendicular to the c-axis (ordinary, no) is much higher than that with an electric field parallel to the c-axis (extraordinary, ne). By inclusion of turbostratic- (t-) phase layers within h-BN having an average inclination angle (θ) with respect to the ideal c-plane, a simple method for quantifying θ has been deduced. Our results revealed that the presence of t-phase layers decreases the optical anisotropy of h-BN and that a signature of improved crystalline quality is an increase in the ordinary index of refraction (no) as a result of the average incline angle θ approaching 0° and predicted that no = 2.7 and ne = 1.5 at 280 nm for single crystalline h-BN epilayers. 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A.</creatorcontrib><creatorcontrib>Li, J.</creatorcontrib><creatorcontrib>Lin, J. Y.</creatorcontrib><creatorcontrib>Jiang, H. X.</creatorcontrib><creatorcontrib>Texas Tech Univ., Lubbock, TX (United States)</creatorcontrib><title>Anisotropic index of refraction and structural properties of hexagonal boron nitride epilayers probed by spectroscopic ellipsometry</title><title>Journal of applied physics</title><description>The anisotropic index of refraction of 200 μm thick boron-10 enriched hexagonal boron nitride (h-BN) freestanding epilayers grown by metalorganic chemical vapor deposition has been measured using spectroscopic ellipsometry in the UV (4.0–5.1 eV) spectral range. It was found that the index of refraction for the polarization mode with an electric field perpendicular to the c-axis (ordinary, no) is much higher than that with an electric field parallel to the c-axis (extraordinary, ne). 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subjects Chemical vapor deposition
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Crystallography
Dielectric properties
Effective mass
Geometrical optics
Optical constants
Optical metrology
Optical properties
Physics
Semiconductors
X-ray diffraction
title Anisotropic index of refraction and structural properties of hexagonal boron nitride epilayers probed by spectroscopic ellipsometry
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