Al 0.68 Sc 0.32 N Lamb wave resonators with electromechanical coupling coefficients near 10.28

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Veröffentlicht in:	Applied physics letters 2021-04, Vol.118 (17)
Hauptverfasser:	Esteves, Giovanni, Young, Travis R., Tang, Zichen, Yen, Sean, Bauer, Todd M., Henry, Michael D., Olsson, III, Roy H.
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Sprache:	eng
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title	Al 0.68 Sc 0.32 N Lamb wave resonators with electromechanical coupling coefficients near 10.28
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