Fabrication of Six Degrees-of-Freedom Hexflex Positioner With Integrated Strain Sensing Using Nonlithographically Based Microfabrication

A process flow is described for the low cost, flexible fabrication of metal micro-electromechanical systems (MEMS) with high performance integrated sensing. The process is capable of producing new designs in ≈1 week at an average unit cost of 30× increase in sensing dynamic range over comparable sta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of micro and nano-manufacturing 2021-03, Vol.9 (1)
Hauptverfasser:	Panas, Robert M, Culpepper, Martin L
Format:	Artikel
Sprache:	eng
Schlagworte:	ENGINEERING microfabrication nanopositioner nonlithographically based microfabrication piezoresistor Schottky diode sensor strain gage
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!