Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films
We use short wavelength extreme ultraviolet light to independently measure the mechanical properties of disparate layers within a bilayer film for the first time, with single-monolayer sensitivity. We show that in Ni/Ta nanostructured systems, while their density ratio is not meaningfully changed fr...
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| Veröffentlicht in: | Nano letters 2016-08, Vol.16 (8), p.4773-4778 |
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| container_title | Nano letters |
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| creator | Hoogeboom-Pot, Kathleen M Turgut, Emrah Hernandez-Charpak, Jorge N Shaw, Justin M Kapteyn, Henry C Murnane, Margaret M Nardi, Damiano |
| description | We use short wavelength extreme ultraviolet light to independently measure the mechanical properties of disparate layers within a bilayer film for the first time, with single-monolayer sensitivity. We show that in Ni/Ta nanostructured systems, while their density ratio is not meaningfully changed from that expected in bulk, their elastic properties are significantly modified, where nickel softens while tantalum stiffens, relative to their bulk counterparts. In particular, the presence or absence of the Ta capping layer influences the mechanical properties of the Ni film. This nondestructive nanomechanical measurement technique represents the first approach to date able to distinguish the properties of composite materials well below 100 nm in thickness. This capability is critical for understanding and optimizing the strength, flexibility and reliability of materials in a host of nanostructured electronic, photovoltaic, and thermoelectric devices. |
| doi_str_mv | 10.1021/acs.nanolett.6b00606 |
| format | Article |
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We show that in Ni/Ta nanostructured systems, while their density ratio is not meaningfully changed from that expected in bulk, their elastic properties are significantly modified, where nickel softens while tantalum stiffens, relative to their bulk counterparts. In particular, the presence or absence of the Ta capping layer influences the mechanical properties of the Ni film. This nondestructive nanomechanical measurement technique represents the first approach to date able to distinguish the properties of composite materials well below 100 nm in thickness. 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We show that in Ni/Ta nanostructured systems, while their density ratio is not meaningfully changed from that expected in bulk, their elastic properties are significantly modified, where nickel softens while tantalum stiffens, relative to their bulk counterparts. In particular, the presence or absence of the Ta capping layer influences the mechanical properties of the Ni film. This nondestructive nanomechanical measurement technique represents the first approach to date able to distinguish the properties of composite materials well below 100 nm in thickness. This capability is critical for understanding and optimizing the strength, flexibility and reliability of materials in a host of nanostructured electronic, photovoltaic, and thermoelectric devices.</description><subject>layers</subject><subject>MATERIALS SCIENCE</subject><subject>monolayer sensitivity</subject><subject>nanomechanical properties</subject><subject>nanometrology</subject><subject>photoacoustics</subject><subject>quantum mechanics</subject><subject>thickness</subject><subject>thin films</subject><subject>Ultrafast X-rays</subject><subject>ultrathin films</subject><subject>vesicles</subject><issn>1530-6984</issn><issn>1530-6992</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNp9kU1r3DAQhkVoaT7afxCK6CkXbyXZkuVjsiRpYfsBSc5CHo-Jgi1tJTmQfx8tu8mxpxmG550Z3peQc85WnAn-3UJaeevDhDmvVM-YYuqInHBZs0p1nfjw3uvmmJym9MQY62rJPpFj0QotW96dEP87-AFTjgtk94z0F9q0RJzRZxpGmh-RXj-Hacku-N1gY18wVndbBDc6KDg8Wu_ATvRvDFuM2WGiztO7pa84o36mV27aaeiNm-b0mXwc7ZTwy6GekYeb6_v1j2rz5_bn-nJT2UbwXPUDazW3AvTQ9Ew2tsWhHq0GDlpJKVBxLaEDqIVF1F2tZY9N19eitXwcoT4j3_Z7Q8rOJHC5PArBe4RsuNJCSF6giz20jeHfUkwws0uA02Q9hiUZrjnTqmWqKWizRyGGlCKOZhvdbOOL4czs4jAlDvMWhznEUWRfDxeWfsbhXfTmfwHYHtjJn8ISfXHl_ztfAdfQmtI</recordid><startdate>20160810</startdate><enddate>20160810</enddate><creator>Hoogeboom-Pot, Kathleen M</creator><creator>Turgut, Emrah</creator><creator>Hernandez-Charpak, Jorge N</creator><creator>Shaw, Justin M</creator><creator>Kapteyn, Henry C</creator><creator>Murnane, Margaret M</creator><creator>Nardi, Damiano</creator><general>American Chemical Society</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>OIOZB</scope><scope>OTOTI</scope></search><sort><creationdate>20160810</creationdate><title>Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films</title><author>Hoogeboom-Pot, Kathleen M ; Turgut, Emrah ; Hernandez-Charpak, Jorge N ; Shaw, Justin M ; Kapteyn, Henry C ; Murnane, Margaret M ; Nardi, Damiano</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a421t-bd0781a2c8d4b054a7ed3fa8c1c86552e6185c9cc32aee89385be49b327a1ffc3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>layers</topic><topic>MATERIALS SCIENCE</topic><topic>monolayer sensitivity</topic><topic>nanomechanical properties</topic><topic>nanometrology</topic><topic>photoacoustics</topic><topic>quantum mechanics</topic><topic>thickness</topic><topic>thin films</topic><topic>Ultrafast X-rays</topic><topic>ultrathin films</topic><topic>vesicles</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hoogeboom-Pot, Kathleen M</creatorcontrib><creatorcontrib>Turgut, Emrah</creatorcontrib><creatorcontrib>Hernandez-Charpak, Jorge N</creatorcontrib><creatorcontrib>Shaw, Justin M</creatorcontrib><creatorcontrib>Kapteyn, Henry C</creatorcontrib><creatorcontrib>Murnane, Margaret M</creatorcontrib><creatorcontrib>Nardi, Damiano</creatorcontrib><creatorcontrib>Univ. of Colorado, Boulder, CO (United States)</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>OSTI.GOV - Hybrid</collection><collection>OSTI.GOV</collection><jtitle>Nano letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hoogeboom-Pot, Kathleen M</au><au>Turgut, Emrah</au><au>Hernandez-Charpak, Jorge N</au><au>Shaw, Justin M</au><au>Kapteyn, Henry C</au><au>Murnane, Margaret M</au><au>Nardi, Damiano</au><aucorp>Univ. of Colorado, Boulder, CO (United States)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films</atitle><jtitle>Nano letters</jtitle><addtitle>Nano Lett</addtitle><date>2016-08-10</date><risdate>2016</risdate><volume>16</volume><issue>8</issue><spage>4773</spage><epage>4778</epage><pages>4773-4778</pages><issn>1530-6984</issn><eissn>1530-6992</eissn><abstract>We use short wavelength extreme ultraviolet light to independently measure the mechanical properties of disparate layers within a bilayer film for the first time, with single-monolayer sensitivity. We show that in Ni/Ta nanostructured systems, while their density ratio is not meaningfully changed from that expected in bulk, their elastic properties are significantly modified, where nickel softens while tantalum stiffens, relative to their bulk counterparts. In particular, the presence or absence of the Ta capping layer influences the mechanical properties of the Ni film. This nondestructive nanomechanical measurement technique represents the first approach to date able to distinguish the properties of composite materials well below 100 nm in thickness. This capability is critical for understanding and optimizing the strength, flexibility and reliability of materials in a host of nanostructured electronic, photovoltaic, and thermoelectric devices.</abstract><cop>United States</cop><pub>American Chemical Society</pub><pmid>27285719</pmid><doi>10.1021/acs.nanolett.6b00606</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record> |
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| source | ACS Publications |
| subjects | layers MATERIALS SCIENCE monolayer sensitivity nanomechanical properties nanometrology photoacoustics quantum mechanics thickness thin films Ultrafast X-rays ultrathin films vesicles |
| title | Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films |
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