Aluminum oxide free-standing thin films to enable nitrogen edge soft x-ray scattering

Resonant soft x-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available x-ray transparent substrates are composed of Si3N4 and thereby absorb incident x-rays and generate incoherent fluoresce...

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Veröffentlicht in:	MRS communications 2018-09, Vol.9 (1)
Hauptverfasser:	Ye, Dan, Rongpipi, Sintu, Litofsky, Joshua H., Lee, Youngmin, Culp, Tyler E., Yoo, Sang Ha, Jackson, Thomas N., Wang, Cheng, Gomez, Esther W., Gomez, Enrique D.
Format:	Artikel
Sprache:	eng
Schlagworte:	MATERIALS SCIENCE
Online-Zugang:	Volltext
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