Argon metastable and resonant level densities in Ar and Ar/Cl2 discharges used for the processing of bulk niobium

A comparative analysis of two popular spectroscopy techniques is conducted in a coaxial cylindrical capacitively coupled discharge designed for the plasma processing of superconducting radio frequency (SRF) cavities. The density of the metastable and resonant levels in Ar is measured in both Ar and...

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Veröffentlicht in:	Journal of applied physics 2019-09, Vol.126 (10)
Hauptverfasser:	Peshl, Jeremy, McNeill, Roderick, Sukenik, Charles I., Nikolić, Milka, Popović, Svetozar, Vŭsković, Leposava
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption spectroscopy Applied physics Argon Atomic and molecular collisions CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS Density Discharge Electron energy distribution Etching Gas temperature Holes Lasers Line spectra Neutral gases Niobium Optical emission spectroscopy Parameters Physics Plasma diagnostics Plasma processing Plasma properties and parameters Semiconductor lasers Spectroscopy Spectrum analysis Superconductivity Tunable lasers
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