Tunable structure and connectivity of organosilica hybrid films by using different epoxy based precursors in atmospheric plasma deposition

[Display omitted] •Organosilica and fluorinated films were deposited by atmospheric plasma deposition.•Structure and connectivity of deposited films strongly depends on the precursor molecule.•The use of epoxy-based precursors increased the organic character of the films.•A preferential orientation...

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Veröffentlicht in:	Applied surface science 2020-04, Vol.508 (C), p.145233, Article 145233
Hauptverfasser:	Moriche, R., Ding, Y., Dong, S., Zhao, O., Dauskardt, R.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atmospheric plasma deposition Fluorinated Hybrid film Organosilica
Online-Zugang:	Volltext
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