Improving microstructural quantification in FIB/SEM nanotomography

FIB/SEM nanotomography (FIB-nt) is a powerful technique for the determination and quantification of the three-dimensional microstructure in subsurface features. Often times, the microstructure of a sample is the ultimate determiner of the overall performance of a system, and a detailed understanding...

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Bibliographische Detailangaben

Veröffentlicht in:	Ultramicroscopy 2018-01, Vol.184 (Pt A), p.24-38
Hauptverfasser:	Taillon, Joshua A., Pellegrinelli, Christopher, Huang, Yi-Lin, Wachsman, Eric D., Salamanca-Riba, Lourdes G.
Format:	Artikel
Sprache:	eng
Schlagworte:	3D reconstruction Focused ion beam Microscopy Microstructure quantification Scanning electron microscopy Tortuosity Triple phase boundaries
Online-Zugang:	Volltext
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