Tailoring the mechanical properties of sputter deposited nanotwinned nickel-molybdenum-tungsten films
Advanced metallic alloys are attractive in microelectromechanical systems (MEMS) applications that require high density, electrical and thermal conductivity, strength, and dimensional stability. Here we report the mechanical behavior of direct current (DC) magnetron sputter deposited Nickel (Ni)-Mol...
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| Veröffentlicht in: | Acta materialia 2018-02, Vol.144 (C), p.216-225 |
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| creator | Sim, Gi-Dong Krogstad, Jessica A. Xie, Kelvin Y. Dasgupta, Suman Valentino, Gianna M. Weihs, Timothy P. Hemker, Kevin J. |
| description | Advanced metallic alloys are attractive in microelectromechanical systems (MEMS) applications that require high density, electrical and thermal conductivity, strength, and dimensional stability. Here we report the mechanical behavior of direct current (DC) magnetron sputter deposited Nickel (Ni)-Molybdenum (Mo)-Tungsten (W) films annealed at various temperatures. The films deposit as single-phase nanotwinned solid solutions and possess ultra-high tensile strengths of approximately 3 GPa, but negligible ductility. Subsequent heat treatments resulted in grain growth and nucleation of Mo-rich precipitates. While films annealed at 600 °C or 800 °C for 1 h still showed brittle behavior, films annealed at 1,000 °C for 1 h were found to exhibit strength greater than 1.2 GPa and near 10% tensile ductility. In addition to the excellent mechanical properties, alloy films further exhibit remarkably improved dimensional stability – a lower coefficient of thermal expansion and greater microstructural stability. An excellent balance between mechanical properties and dimensional stability make sputter deposited Ni-Mo-W alloys promising structural materials for MEMS applications.
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| doi_str_mv | 10.1016/j.actamat.2017.10.065 |
| format | Article |
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[Display omitted]</description><subject>Brittle-to-ductile transition</subject><subject>Materials Science</subject><subject>Metal MEMS</subject><subject>Metallurgy & Metallurgical Engineering</subject><subject>Nanotwins</subject><subject>Nickel alloy</subject><subject>Sputter deposition</subject><issn>1359-6454</issn><issn>1873-2453</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNqFUMtOwzAQjBBIlMInIEXcU-w4ttMTQhUvqRKXco6c9aZ1SezIdkH9exy1d0472p2dnZ0su6dkQQkVj_uFgqgGFRcloTL1FkTwi2xGa8mKsuLsMmHGl4WoeHWd3YSwJ4SWsiKzDDfK9M4bu83jDvMBYaesAdXno3cj-mgw5K7Lw3iIEX2ucXTBRNS5VdbFX2PthA18Y18Mrj-2Gu1hKOLBbkNEm3emH8JtdtWpPuDduc6zr9eXzeq9WH--faye1wWwmsWibZdS8FqKCjkBVWkQnPNOCFYDSNVWFe26Wpei1CXweskkI5jGAKqjHDWbZw8nXReiaQIko7ADlzxCbChnsl7KROInEngXgseuGb0ZlD82lDRToM2-OQfaTIFO7RRo2ns67WH64Megnw6gBdTGT_ramX8U_gBpQYR9</recordid><startdate>20180201</startdate><enddate>20180201</enddate><creator>Sim, Gi-Dong</creator><creator>Krogstad, Jessica A.</creator><creator>Xie, Kelvin Y.</creator><creator>Dasgupta, Suman</creator><creator>Valentino, Gianna M.</creator><creator>Weihs, Timothy P.</creator><creator>Hemker, Kevin J.</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20180201</creationdate><title>Tailoring the mechanical properties of sputter deposited nanotwinned nickel-molybdenum-tungsten films</title><author>Sim, Gi-Dong ; Krogstad, Jessica A. ; Xie, Kelvin Y. ; Dasgupta, Suman ; Valentino, Gianna M. ; Weihs, Timothy P. ; Hemker, Kevin J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c383t-bb97658764e50ca4dc6555f6638cc7ab441ff8d262d2c5893730ef66ccaf15ed3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Brittle-to-ductile transition</topic><topic>Materials Science</topic><topic>Metal MEMS</topic><topic>Metallurgy & Metallurgical Engineering</topic><topic>Nanotwins</topic><topic>Nickel alloy</topic><topic>Sputter deposition</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Sim, Gi-Dong</creatorcontrib><creatorcontrib>Krogstad, Jessica A.</creatorcontrib><creatorcontrib>Xie, Kelvin Y.</creatorcontrib><creatorcontrib>Dasgupta, Suman</creatorcontrib><creatorcontrib>Valentino, Gianna M.</creatorcontrib><creatorcontrib>Weihs, Timothy P.</creatorcontrib><creatorcontrib>Hemker, Kevin J.</creatorcontrib><creatorcontrib>Johns Hopkins Univ., Baltimore, MD (United States)</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Acta materialia</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Sim, Gi-Dong</au><au>Krogstad, Jessica A.</au><au>Xie, Kelvin Y.</au><au>Dasgupta, Suman</au><au>Valentino, Gianna M.</au><au>Weihs, Timothy P.</au><au>Hemker, Kevin J.</au><aucorp>Johns Hopkins Univ., Baltimore, MD (United States)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Tailoring the mechanical properties of sputter deposited nanotwinned nickel-molybdenum-tungsten films</atitle><jtitle>Acta materialia</jtitle><date>2018-02-01</date><risdate>2018</risdate><volume>144</volume><issue>C</issue><spage>216</spage><epage>225</epage><pages>216-225</pages><issn>1359-6454</issn><eissn>1873-2453</eissn><abstract>Advanced metallic alloys are attractive in microelectromechanical systems (MEMS) applications that require high density, electrical and thermal conductivity, strength, and dimensional stability. Here we report the mechanical behavior of direct current (DC) magnetron sputter deposited Nickel (Ni)-Molybdenum (Mo)-Tungsten (W) films annealed at various temperatures. The films deposit as single-phase nanotwinned solid solutions and possess ultra-high tensile strengths of approximately 3 GPa, but negligible ductility. Subsequent heat treatments resulted in grain growth and nucleation of Mo-rich precipitates. While films annealed at 600 °C or 800 °C for 1 h still showed brittle behavior, films annealed at 1,000 °C for 1 h were found to exhibit strength greater than 1.2 GPa and near 10% tensile ductility. In addition to the excellent mechanical properties, alloy films further exhibit remarkably improved dimensional stability – a lower coefficient of thermal expansion and greater microstructural stability. An excellent balance between mechanical properties and dimensional stability make sputter deposited Ni-Mo-W alloys promising structural materials for MEMS applications.
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| ispartof | Acta materialia, 2018-02, Vol.144 (C), p.216-225 |
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| source | Elsevier ScienceDirect Journals |
| subjects | Brittle-to-ductile transition Materials Science Metal MEMS Metallurgy & Metallurgical Engineering Nanotwins Nickel alloy Sputter deposition |
| title | Tailoring the mechanical properties of sputter deposited nanotwinned nickel-molybdenum-tungsten films |
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