Novel electron monochromator for high resolution imaging and spectroscopy

Novel electron monochromator for high resolution imaging and spectroscopy

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Veröffentlicht in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-09, Vol.34 (6)
Hauptverfasser: Mankos, Marian, Shadman, Khashayar, Kolarik, Vladimir
Format: Artikel
Sprache:eng
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Engineering
Physics
Science & Technology - Other Topics
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container_issue 6
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container_title Journal of vacuum science and technology. B, Nanotechnology & microelectronics
container_volume 34
creator Mankos, Marian
Shadman, Khashayar
Kolarik, Vladimir
description Not provided.
doi_str_mv 10.1116/1.4962383
format Article
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identifier ISSN: 2166-2746
ispartof Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2016-09, Vol.34 (6)
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language eng
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source AIP Journals Complete; Alma/SFX Local Collection
subjects Engineering
Physics
Science & Technology - Other Topics
title Novel electron monochromator for high resolution imaging and spectroscopy
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