Silicon Oxide‐Rich Diamond‐Like Carbon: A Conformal, Ultrasmooth Thin Film Material with High Thermo‐Oxidative Stability

Abstract Silicon oxide‐containing diamond‐like carbon (a‐C:H:Si:O) films are a promising class of protective coatings for environmentally‐demanding applications owing to their lower residual stresses and superior thermal stability and oxidation resistance relative to undoped diamond‐like carbon. How...

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Veröffentlicht in:	Advanced materials interfaces 2018-11, Vol.6 (2)
Hauptverfasser:	Mangolini, Filippo, McClimon, J. Brandon, Segersten, Justin, Hilbert, James, Heaney, Patrick, Lukes, Jennifer R., Carpick, Robert W.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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