Optical properties of oxygen vacancies in HfO 2 thin films studied by absorption and luminescence spectroscopy

Hafnium oxide thin films with varying oxygen content were investigated with the goal of finding the optical signature of oxygen vacancies in the film structure. It was found that a reduction of oxygen content in the film leads to changes in both, structural and optical characteristics. Optical absor...

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Veröffentlicht in:	Optics express 2018-06, Vol.26 (13), p.17608
Hauptverfasser:	Papernov, S, Brunsman, M D, Oliver, J B, Hoffman, B N, Kozlov, A A, Demos, S G, Shvydky, A, Cavalcante, F H M, Yang, L, Menoni, C S, Roshanzadeh, B, Boyd, S T P, Emmert, L A, Rudolph, W
Format:	Artikel
Sprache:	eng
Schlagworte:	MATERIALS SCIENCE
Online-Zugang:	Volltext
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