High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)

Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a resist-free, nanofabrication compatible, direct-write method. The basic working principles of a computer-aided desig...

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Veröffentlicht in:	ACS applied nano materials 2018-03, Vol.1 (3), p.1028-1041
Hauptverfasser:	Fowlkes, Jason D, Winkler, R, Lewis, Brett B, Fernández-Pacheco, A, Skoric, L, Sanz-Hernández, D, Stanford, Michael G, Mutunga, Eva, Rack, P. D, Plank, H
Format:	Artikel
Sprache:	eng
Schlagworte:	3D-nanoprinting additive manufacturing computer-aided design direct write focused electron beam induced deposition NANOSCIENCE AND NANOTECHNOLOGY
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