Versatile technique for assessing thickness of 2D layered materials by XPS

X-ray photoelectron spectroscopy (XPS) has been utilized as a versatile method for thickness characterization of various two-dimensional (2D) films. Accurate thickness can be measured simultaneously while acquiring XPS data for chemical characterization of 2D films having thickness up to approximate...

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Veröffentlicht in:	Nanotechnology 2018-03, Vol.29 (11), p.115705-115705
Hauptverfasser:	Zemlyanov, Dmitry Y, Jespersen, Michael, Zakharov, Dmitry N, Hu, Jianjun, Paul, Rajib, Kumar, Anurag, Pacley, Shanee, Glavin, Nicholas, Saenz, David, Smith, Kyle C, Fisher, Timothy S, Voevodin, Andrey A
Format:	Artikel
Sprache:	eng
Schlagworte:	2D film thickness amorphous BN film few-layer graphene MoS MoS2 film NANOSCIENCE AND NANOTECHNOLOGY non-destructive measurement XPS thickness measurement
Online-Zugang:	Volltext
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