Analyzing pattern retention for multilayer focused ion beam induced quantum dot structures

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2013-05, Vol.31 (3)
Hauptverfasser:	Luengo-Kovac, Marta, Saucer, Timothy W., Martin, Andrew J., Millunchick, Joanna, Sih, Vanessa
Format:	Artikel
Sprache:	eng
Schlagworte:	solar (photovoltaic), solar (thermal), phonons, thermal conductivity, thermoelectric, electrodes - solar, defects, charge transport, materials and chemistry by design, optics, synthesis (novel materials), synthesis (self-assembly)
Online-Zugang:	Volltext
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