Confocal sputtering of conformal α-β phase W films on etched Al features

The authors report on thin-film processing improvements in the fabrication of superconducting quasiparticle-trap-assisted electrothermal-feedback transition-edge sensors used in the design of cryogenic dark matter search detectors. The work was performed as part of a detector upgrade project that in...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2015-01, Vol.33 (1)
Hauptverfasser:	Kreikebaum, John Mark, Cabrera, Blas, Yen, Jeffrey J., Brink, Paul L., Cherry, Matt, Tomada, Astrid, Young, Betty A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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