Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

Focused electron beam induced deposition (FEBID) is one of the few techniques that enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of simple architectures such as vertical or curving nanowires has been achieved by simple trial and error, processing complex 3D...

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Veröffentlicht in:	ACS nano 2016-06, Vol.10 (6), p.6163-6172
Hauptverfasser:	Fowlkes, Jason D, Winkler, Robert, Lewis, Brett B, Stanford, Michael G, Plank, Harald, Rack, Philip D
Format:	Artikel
Sprache:	eng
Schlagworte:	3D nanoprinting direct-write focused electron beam induced deposition nanofabrication NANOSCIENCE AND NANOTECHNOLOGY
Online-Zugang:	Volltext
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