Synthesis of β-Mo2C Thin Films

Thin films of stoichiometric β-Mo2C were fabricated using a two-step synthesis process. Dense molybdenum oxide films were first deposited by plasma-enhanced chemical vapor deposition using mixtures of MoF6, H2, and O2. The dependence of operating parameters with respect to deposition rate and qualit...

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Veröffentlicht in:	ACS applied materials & interfaces 2011-02, Vol.3 (2), p.517-521
Hauptverfasser:	Wolden, Colin A, Pickerell, Anna, Gawai, Trupti, Parks, Sterling, Hensley, Jesse, Way, J. Douglas
Format:	Artikel
Sprache:	eng
Schlagworte:	carbide catalyst MATERIALS SCIENCE oxide plasma-enhanced chemical vapor deposition SOLAR ENERGY thin film
Online-Zugang:	Volltext
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