Spontaneous lateral phase separation of AlInP during thin film growth and its effect on luminescence

The occurrence of spontaneous lateral phase separation during thin film growth of AlxIn1−xP by metal-organic chemical vapor deposition was investigated using a combination of transmission electron microscopy and atom probe tomography to obtain a quantitative view of this phenomenon. An anisotropic a...

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Veröffentlicht in:Journal of applied physics 2015-09, Vol.118 (11)
Hauptverfasser: Mukherjee, Kunal, Norman, Andrew G., Akey, Austin J., Buonassisi, Tonio, Fitzgerald, Eugene A.
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container_title Journal of applied physics
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creator Mukherjee, Kunal
Norman, Andrew G.
Akey, Austin J.
Buonassisi, Tonio
Fitzgerald, Eugene A.
description The occurrence of spontaneous lateral phase separation during thin film growth of AlxIn1−xP by metal-organic chemical vapor deposition was investigated using a combination of transmission electron microscopy and atom probe tomography to obtain a quantitative view of this phenomenon. An anisotropic and coherent composition modulation was observed in the nearly lattice-matched films deposited below 750 °C with a quasi-linear amplification with thickness that was inversely proportional to the growth temperature. The periodicity of the modulation increased exponentially with the growth temperature. A comparison of photoluminescence from phase separated and homogenous direct band gap AlxIn1−xP deposited on metamorphic InyGa1−yAs graded buffers showed a lowering of peak-emission energy in accordance with the atom probe compositional characterization without any degradation in luminous intensity. Additionally, indications of carrier trapping in the low band gap regions were observed even at room-temperature. While some of these results are in qualitative agreement with theoretical models of kinetic instability in unstrained alloy growth in the literature, significant discrepancies remain.
doi_str_mv 10.1063/1.4930990
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source American Institute of Physics; Alma/SFX Local Collection
subjects aluminium
Applied physics
Band gap
chemical vapor deposition
emission spectroscopy
Energy gap
Film growth
III-V semiconductors
Lattice matching
Luminous intensity
MATERIALS SCIENCE
Metalorganic chemical vapor deposition
Modulation
optical metrology
Organic chemicals
Organic chemistry
Periodic variations
Phase separation
phase transitions
Photoluminescence
photoluminescence spectroscopy
Qualitative analysis
quantum wells
semiconductors
SOLAR ENERGY
Stability
thin film growth
Thin films
tomography
Transmission electron microscopy
title Spontaneous lateral phase separation of AlInP during thin film growth and its effect on luminescence
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