Characterization of electron microscopes with binary pseudo-random multilayer test samples

Verification of the reliability of metrology data from high quality X-ray optics requires that adequate methods for test and calibration of the instruments be developed. For such verification for optical surface profilometers in the spatial frequency domain, a modulation transfer function (MTF) cali...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2011-09, Vol.649 (1), p.150-152
Hauptverfasser:	Yashchuk, Valeriy V., Conley, Raymond, Anderson, Erik H., Barber, Samuel K., Bouet, Nathalie, McKinney, Wayne R., Takacs, Peter Z., Voronov, Dmitriy L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays CALIBRATION ELECTRON MICROSCOPES Error reduction Fabrication tolerances GRATINGS INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY Interferometric microscope LAYERS Metrology Metrology of X-ray optics MICROSCOPES MODULATION Modulation transfer function Multilayers OPTICS Power spectral density RELIABILITY Scanning electron microscopy Surface metrology Surface profilometer SURFACES TESTING TRANSFER FUNCTIONS TRANSMISSION Transmission electron microscopy VERIFICATION X-rays
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