Characterization of electron microscopes with binary pseudo-random multilayer test samples
Verification of the reliability of metrology data from high quality X-ray optics requires that adequate methods for test and calibration of the instruments be developed. For such verification for optical surface profilometers in the spatial frequency domain, a modulation transfer function (MTF) cali...
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| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2011-09, Vol.649 (1), p.150-152 |
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| container_title | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment |
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| creator | Yashchuk, Valeriy V. Conley, Raymond Anderson, Erik H. Barber, Samuel K. Bouet, Nathalie McKinney, Wayne R. Takacs, Peter Z. Voronov, Dmitriy L. |
| description | Verification of the reliability of metrology data from high quality X-ray optics requires that adequate methods for test and calibration of the instruments be developed. For such verification for optical surface profilometers in the spatial frequency domain, a modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays has been suggested
[1,2] and proven to be an effective calibration method for a number of interferometric microscopes, a phase shifting Fizeau interferometer, and a scatterometer [5]. Here we describe the details of development of binary pseudo-random multilayer (BPRML) test samples suitable for characterization of scanning (SEM) and transmission (TEM) electron microscopes. We discuss the results of TEM measurements with the BPRML test samples fabricated from a WiSi
2/Si multilayer coating with pseudo-randomly distributed layers. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize X-ray microscopes. Corresponding work with X-ray microscopes is in progress. |
| doi_str_mv | 10.1016/j.nima.2010.11.124 |
| format | Article |
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[1,2] and proven to be an effective calibration method for a number of interferometric microscopes, a phase shifting Fizeau interferometer, and a scatterometer [5]. Here we describe the details of development of binary pseudo-random multilayer (BPRML) test samples suitable for characterization of scanning (SEM) and transmission (TEM) electron microscopes. We discuss the results of TEM measurements with the BPRML test samples fabricated from a WiSi
2/Si multilayer coating with pseudo-randomly distributed layers. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize X-ray microscopes. Corresponding work with X-ray microscopes is in progress.</description><identifier>ISSN: 0168-9002</identifier><identifier>EISSN: 1872-9576</identifier><identifier>DOI: 10.1016/j.nima.2010.11.124</identifier><language>eng</language><publisher>United States: Elsevier B.V</publisher><subject>Arrays ; CALIBRATION ; ELECTRON MICROSCOPES ; Error reduction ; Fabrication tolerances ; GRATINGS ; INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY ; Interferometric microscope ; LAYERS ; Metrology ; Metrology of X-ray optics ; MICROSCOPES ; MODULATION ; Modulation transfer function ; Multilayers ; OPTICS ; Power spectral density ; RELIABILITY ; Scanning electron microscopy ; Surface metrology ; Surface profilometer ; SURFACES ; TESTING ; TRANSFER FUNCTIONS ; TRANSMISSION ; Transmission electron microscopy ; VERIFICATION ; X-rays</subject><ispartof>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2011-09, Vol.649 (1), p.150-152</ispartof><rights>2010 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c404t-1f13bc0180e0af341dd8f6b0b783f75da77dd44c82ad492b051fbff20844a58a3</citedby><cites>FETCH-LOGICAL-c404t-1f13bc0180e0af341dd8f6b0b783f75da77dd44c82ad492b051fbff20844a58a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.nima.2010.11.124$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>230,315,782,786,887,3554,27933,27934,46004</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/1041757$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Yashchuk, Valeriy V.</creatorcontrib><creatorcontrib>Conley, Raymond</creatorcontrib><creatorcontrib>Anderson, Erik H.</creatorcontrib><creatorcontrib>Barber, Samuel K.</creatorcontrib><creatorcontrib>Bouet, Nathalie</creatorcontrib><creatorcontrib>McKinney, Wayne R.</creatorcontrib><creatorcontrib>Takacs, Peter Z.</creatorcontrib><creatorcontrib>Voronov, Dmitriy L.</creatorcontrib><creatorcontrib>BROOKHAVEN NATIONAL LABORATORY (BNL)</creatorcontrib><title>Characterization of electron microscopes with binary pseudo-random multilayer test samples</title><title>Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment</title><description>Verification of the reliability of metrology data from high quality X-ray optics requires that adequate methods for test and calibration of the instruments be developed. For such verification for optical surface profilometers in the spatial frequency domain, a modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays has been suggested
[1,2] and proven to be an effective calibration method for a number of interferometric microscopes, a phase shifting Fizeau interferometer, and a scatterometer [5]. Here we describe the details of development of binary pseudo-random multilayer (BPRML) test samples suitable for characterization of scanning (SEM) and transmission (TEM) electron microscopes. We discuss the results of TEM measurements with the BPRML test samples fabricated from a WiSi
2/Si multilayer coating with pseudo-randomly distributed layers. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize X-ray microscopes. Corresponding work with X-ray microscopes is in progress.</description><subject>Arrays</subject><subject>CALIBRATION</subject><subject>ELECTRON MICROSCOPES</subject><subject>Error reduction</subject><subject>Fabrication tolerances</subject><subject>GRATINGS</subject><subject>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</subject><subject>Interferometric microscope</subject><subject>LAYERS</subject><subject>Metrology</subject><subject>Metrology of X-ray optics</subject><subject>MICROSCOPES</subject><subject>MODULATION</subject><subject>Modulation transfer function</subject><subject>Multilayers</subject><subject>OPTICS</subject><subject>Power spectral density</subject><subject>RELIABILITY</subject><subject>Scanning electron microscopy</subject><subject>Surface metrology</subject><subject>Surface profilometer</subject><subject>SURFACES</subject><subject>TESTING</subject><subject>TRANSFER FUNCTIONS</subject><subject>TRANSMISSION</subject><subject>Transmission electron microscopy</subject><subject>VERIFICATION</subject><subject>X-rays</subject><issn>0168-9002</issn><issn>1872-9576</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp9kEtLxDAUhYMoOD7-gKviyk1rbiedZMCNDL5gwI1u3IQ0uWEytE1NMsr4600Z195NLuE7l3MOIVdAK6CwuN1Wg-tVVdPpAyqo2RGZgeB1uWz44pjMMiTKJaX1KTmLcUvzLLmYkY_VRgWlEwb3o5LzQ-FtgR3qFPLeOx181H7EWHy7tClaN6iwL8aIO-PLoAbj-6Lfdcl1ao-hSBhTEVU_dhgvyIlVXcTLv_ecvD8-vK2ey_Xr08vqfl1qRlkqwcK81RQERarsnIExwi5a2nIxt7wxinNjGNOiVoYt65Y2YFtrayoYU41Q83NyfbjrY3IyapdQb7QfhhxCAmXAG56hmwM0Bv-5yy5l76LGrlMD-l2UsODAGGsYZLQ-oFP2GNDKMeRywz4fk1PbciuntuXUtgSQue0sujuIMCf9chgmIzhoNC5MPox3_8l_Adlvig0</recordid><startdate>20110901</startdate><enddate>20110901</enddate><creator>Yashchuk, Valeriy V.</creator><creator>Conley, Raymond</creator><creator>Anderson, Erik H.</creator><creator>Barber, Samuel K.</creator><creator>Bouet, Nathalie</creator><creator>McKinney, Wayne R.</creator><creator>Takacs, Peter Z.</creator><creator>Voronov, Dmitriy L.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>OTOTI</scope></search><sort><creationdate>20110901</creationdate><title>Characterization of electron microscopes with binary pseudo-random multilayer test samples</title><author>Yashchuk, Valeriy V. ; Conley, Raymond ; Anderson, Erik H. ; Barber, Samuel K. ; Bouet, Nathalie ; McKinney, Wayne R. ; Takacs, Peter Z. ; Voronov, Dmitriy L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c404t-1f13bc0180e0af341dd8f6b0b783f75da77dd44c82ad492b051fbff20844a58a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Arrays</topic><topic>CALIBRATION</topic><topic>ELECTRON MICROSCOPES</topic><topic>Error reduction</topic><topic>Fabrication tolerances</topic><topic>GRATINGS</topic><topic>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</topic><topic>Interferometric microscope</topic><topic>LAYERS</topic><topic>Metrology</topic><topic>Metrology of X-ray optics</topic><topic>MICROSCOPES</topic><topic>MODULATION</topic><topic>Modulation transfer function</topic><topic>Multilayers</topic><topic>OPTICS</topic><topic>Power spectral density</topic><topic>RELIABILITY</topic><topic>Scanning electron microscopy</topic><topic>Surface metrology</topic><topic>Surface profilometer</topic><topic>SURFACES</topic><topic>TESTING</topic><topic>TRANSFER FUNCTIONS</topic><topic>TRANSMISSION</topic><topic>Transmission electron microscopy</topic><topic>VERIFICATION</topic><topic>X-rays</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yashchuk, Valeriy V.</creatorcontrib><creatorcontrib>Conley, Raymond</creatorcontrib><creatorcontrib>Anderson, Erik H.</creatorcontrib><creatorcontrib>Barber, Samuel K.</creatorcontrib><creatorcontrib>Bouet, Nathalie</creatorcontrib><creatorcontrib>McKinney, Wayne R.</creatorcontrib><creatorcontrib>Takacs, Peter Z.</creatorcontrib><creatorcontrib>Voronov, Dmitriy L.</creatorcontrib><creatorcontrib>BROOKHAVEN NATIONAL LABORATORY (BNL)</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>OSTI.GOV</collection><jtitle>Nuclear instruments & methods in physics research. 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[1,2] and proven to be an effective calibration method for a number of interferometric microscopes, a phase shifting Fizeau interferometer, and a scatterometer [5]. Here we describe the details of development of binary pseudo-random multilayer (BPRML) test samples suitable for characterization of scanning (SEM) and transmission (TEM) electron microscopes. We discuss the results of TEM measurements with the BPRML test samples fabricated from a WiSi
2/Si multilayer coating with pseudo-randomly distributed layers. In particular, we demonstrate that significant information about the metrological reliability of the TEM measurements can be extracted even when the fundamental frequency of the BPRML sample is smaller than the Nyquist frequency of the measurements. The measurements demonstrate a number of problems related to the interpretation of the SEM and TEM data. Note that similar BPRML test samples can be used to characterize X-ray microscopes. Corresponding work with X-ray microscopes is in progress.</abstract><cop>United States</cop><pub>Elsevier B.V</pub><doi>10.1016/j.nima.2010.11.124</doi><tpages>3</tpages><oa>free_for_read</oa></addata></record> |
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| ispartof | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2011-09, Vol.649 (1), p.150-152 |
| issn | 0168-9002 1872-9576 |
| language | eng |
| recordid | cdi_osti_scitechconnect_1041757 |
| source | Access via ScienceDirect (Elsevier) |
| subjects | Arrays CALIBRATION ELECTRON MICROSCOPES Error reduction Fabrication tolerances GRATINGS INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY Interferometric microscope LAYERS Metrology Metrology of X-ray optics MICROSCOPES MODULATION Modulation transfer function Multilayers OPTICS Power spectral density RELIABILITY Scanning electron microscopy Surface metrology Surface profilometer SURFACES TESTING TRANSFER FUNCTIONS TRANSMISSION Transmission electron microscopy VERIFICATION X-rays |
| title | Characterization of electron microscopes with binary pseudo-random multilayer test samples |
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