A New Type of High Bandwidth RF MEMS Switch

A New Type of High Bandwidth RF MEMS Switch

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Veröffentlicht in:Journal of semiconductor technology and science 2002, Vol.2 (4), p.237-245
Hauptverfasser: Bernd Schauwecker, Karl M. Strohm, Winfried Simon, Jan Mehner, Johann-Friedrich Luy
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Sprache:eng
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container_end_page 245
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container_title Journal of semiconductor technology and science
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creator Bernd Schauwecker
Karl M. Strohm
Winfried Simon
Jan Mehner
Johann-Friedrich Luy
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issn 1598-1657
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source EZB-FREE-00999 freely available EZB journals; Free Full-Text Journals in Chemistry
title A New Type of High Bandwidth RF MEMS Switch
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