A review of vibration-based MEMS hybrid energy harvesters

Energy harvesters based on Micro-electromechanical systems (MEMS) are well known nowadays due to their small features, ability for monolithic integration with the integrated circuit in a single platform, robust, and easily fabricated in bulk. The piezoelectric (PZT) and the electromagnetic (EM) generators are examples of such energy harvesters. To further increase their effectiveness in harvesting ambient energy, researchers started to venture into hybrid energy harvesters. Few literature reviews may be found on MEMS harvesting devices, but not on hybrid harvesters in specific. This paper intended to further elaborate on the hybrid energy harvesters, reported Literature on such harvesters for recent years with different architectures, models, and results are presented. Table of power comparison between the reported harvesters is presented and discussed.