Hall Current Plasma Source Having a Center-Mounted or a Surface-Mounted Cathode

A miniature Hall current plasma source apparatus having magnetic shielding of the walls from ionized plasma, an integrated discharge channel and gas distributor, an instant-start hollow cathode mounted to the plasma source, and an externally mounted keeper, is described. The apparatus offers advanta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Martinez, Rafael A., Williams, John D., Moritz, Jr, Joel A., Farnell, Casey C.
Format: Report
Sprache:eng
Schlagworte:
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