Novel High Temperature Capacitive Pressure Sensor Utilizing SiC Integrated Circuit Twin Ring Oscillators

This paper describes initial development and testing of a novel high temperature capacitive pressure sensor system. The pressure sensor system consists of two 4H-SiC 11-stage ring oscillators and a SiCN capacitive pressure sensor. One oscillator has the capacitive pressure sensor fixed at one node i...

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Hauptverfasser:	Scardelletti, M., Neudeck, P., Spry, D., Meredith, R., Jordan, J., Prokop, N., Krasowski, M., Beheim, G., Hunter, G.
Format:	Other
Sprache:	eng
Schlagworte:	Space Transportation And Safety
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