Achieving Zero Stress in Iridium, Chromium, and Nickel Thin Films

We examine a method for achieving zero intrinsic stress in thin films of iridium, chromium, and nickel deposited by magnetron sputter deposition. The examination of the stress in these materials is motivated by efforts to advance the optical performance of light-weight x-ray space telescopes into th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Broadway, David M., Weimer, Jeffrey, Gurgew, Danielle, Lis, Tomasz, Ramsey, Brian D., O'Dell, Stephen L., Ames, A., Bruni, R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Optics
Online-Zugang:	Volltext bestellen
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