Beam masking to reduce cyclic error in beam launcher of interferometer

Embodiments of the present invention are directed to reducing cyclic error in the beam launcher of an interferometer. In one embodiment, an interferometry apparatus comprises a reference beam directed along a reference path, and a measurement beam spatially separated from the reference beam and bein...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ames, Lawrence L., Bell, Raymond Mark, Dutta, Kalyan
Format:	Report
Sprache:	eng
Schlagworte:	Optics
Online-Zugang:	Volltext bestellen
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