Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5 micrometers silicon nitride micro-shutter for use in a spacebased Multi-object Spectrometer (MOS). The microshutter uses a torsion hinge to go from the closed, 0 degree, position, to the open...

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Hauptverfasser: Loughlin, James P., Fettig, Rainer K., Moseley, S. Harvey, Kutyrev, Alexander S., Mott, D. Brent, Obenschain, Arthur F.
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Instrumentation And Photography
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Fettig, Rainer K.
Moseley, S. Harvey
Kutyrev, Alexander S.
Mott, D. Brent
Obenschain, Arthur F.
description Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5 micrometers silicon nitride micro-shutter for use in a spacebased Multi-object Spectrometer (MOS). The microshutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion hinge are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.
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title Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications
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