Argon/UF6 plasma exhaust gas reconstitution experiments using preheated fluorine and on-line diagnostics

The feasibility of employing a flowing, high-temperature, pure fluorine/UF6 regeneration system to efficiently convert a large fraction of the effluent plasma exhaust back to pure UF6 was demonstrated. The custom built T.O.F. mass spectrometer sampling system permitted on-line measurements of the UF...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Roman, W. C.
Format:	Report
Sprache:	eng
Schlagworte:	Plasma Physics
Online-Zugang:	Volltext bestellen
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