A silicon-based neural probe with densely-packed low-impedance titanium nitride microelectrodes for ultrahigh-resolution in vivo recordings

In this study, we developed and validated a single-shank silicon-based neural probe with 128 closely-packed microelectrodes suitable for high-resolution extracellular recordings. The 8-mm-long, 100-µm-wide and 50-µm-thick implantable shank of the probe fabricated using a 0.13-µm complementary metal-...

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Veröffentlicht in:	BIOSENSORS & BIOELECTRONICS 2018-05, Vol.106, p.86-92
Hauptverfasser:	Fiath, Richard, Raducanu, Bogdan Cristian, Musa, Silke, Andrei, Alexandru, Lopez, Carolina Mora, van Hoof, Chris, Ruther, Patrick, Aarts, Arno, Horvath, Domonkos, Ulbert, Istvan
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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