Self-assembly from milli-to nanoscales: methods and applications

The design and fabrication techniques for microelectromechanical systems (MEMS) and nanodevices are progressing rapidly. However, due to material and process flow incompatibilities in the fabrication of sensors, actuators and electronic circuitry, a final packaging step is often necessary to integra...

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Veröffentlicht in:	Journal of Micromechanics and Microengineering 2009-08, Vol.19 (8), p.1-37
Hauptverfasser:	Mastrangeli, Massimo, Abbasi, Shaghayegh, Varel, Cagdas, Van Hoof, Christiaan, Celis, Jean-Pierre, Böhringer, Karl F
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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