Thick-Film Silicon-on-Insulator Wafers Preparation and Properties

Thick-Film Silicon-on-Insulator Wafers Preparation and Properties

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Hauptverfasser: Theuss Horst, Lindroos Veikko, Petzold Matthias, Tilli Markku, Paulasto-Kröckel Mervi, Motooka Teruaki
Format: Buchkapitel
Sprache:eng
Schlagworte:
Electronic Devices
Electronics & Semiconductors
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creator Theuss Horst
Lindroos Veikko
Petzold Matthias
Tilli Markku
Paulasto-Kröckel Mervi
Motooka Teruaki
description
doi_str_mv 10.1016/B978-0-12-817786-0.00007-4
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ispartof Handbook of Silicon Based MEMS Materials and Technologies, 2020, p.1-1
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source Knovel Library - for Corporate and Government Institutions
subjects Electronic Devices
Electronics & Semiconductors
title Thick-Film Silicon-on-Insulator Wafers Preparation and Properties
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