Effect of Negative Substrate Bias Voltage on the Microstructure and Mechanical Properties of Nanostructured Ti-Al-N-O Coatings Prepared by Cathodic Arc Evaporation

Ternary Ti-X-N coatings, where X = Al, Si, Cr, O, etc., have been widely used for machining tools and cutting tools such as inserts, end-mills, and etc. Ti-Al-N-O coatings were deposited onto silicon wafer and WC-Co substrates by a cathodic arc evaporation (CAE) technique at various negative substra...

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Veröffentlicht in:	한국표면공학회지 2021, Vol.54 (3), p.133-138
Hauptverfasser:	Heo, Sungbo, Kim, Wang Ryeol, Park, In-Wook
Format:	Artikel
Sprache:	kor
Online-Zugang:	Volltext
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